Specification | Unit | Details |
---|---|---|
Wafer Diameter | inch | 8 & 12 Auto Conversion |
Wafer Thickness | µm | 8 inch : 150~ 12 inch : 200~ |
Supportable Tape | - | LC Tape, IRLC Tape |
WPH | wfh | 30 (based on 12inch wafer) |
Wafer Warpage | mm | ±5 |
Wafer Cassette | ea | 2 |
Tape Cutting System | - | Pinnacle Die Pre Cut system |
Machine dimensions (WxDxH) |
mm | 2,100 x 2,140 x 2,100 |
Machine weight | Kg | 2,500 (approx.) |
Controller & GUI | - | PLC & PC |
Clean Room Level | Class | 1,000 |
Noise Level | db | 80 or less |
Power | - | 220V, 3 Pulse, 30A, 60 Hz |
CDA | EA | 5 (0.5Mpa, Φ12 tube) |